Apparatus for performing growth of compound thin films

Details Apparatus for performing growth of compound thin films Apparatus for performing growth of compound thin films

1981-12-11

1983-06-28

Smith, John D.

Coating apparatus

Gas or vapor deposition

With treating means

118726, 118715, 4272557, C23C 1308

Patent

active

043899730

ABSTRACT:
A method and an apparatus are provided for performing growth of compound thin films by alternately repeating separate surface reactions of the substances comprising the compound. A carrier gas affects a diffusion barrier between the surface reaction steps to be separated from each other. The gas phase diffusion barrier is also applied to separate the source regions of different reacting vapors both from each other and from the surface reaction zone.

REFERENCES:
patent: 3602192 (1971-08-01), Grockowski
patent: 3721583 (1973-03-01), Blakeslee
patent: 3825439 (1974-07-01), Tick
patent: 3964937 (1976-06-01), Post et al.
patent: 4015558 (1977-04-01), Small et al.
patent: 4048955 (1977-09-01), Anderson

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