Beam allocation and delivery system for excimer laser

Details Beam allocation and delivery system for excimer laser Beam allocation and delivery system for excimer laser

1988-11-18

1990-07-17

LaRoche, Eugene R.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

350169, 350 9626, 25022728, G02B 2700

Patent

active

049417347

ABSTRACT:
The present invention is directed to a beam allocation and delivery system for an excimer laser in which substantially the full energy from such laser is delivered to a precise area or areas of a workpiece. This efficient system is achieved by the use of one or more elongated light-guides to direct the laser beam. Included therewith are means to shape and focus said beam to a reduced image on the workpiece. Preferably, the shaping and focussing is achieved by changing the cross-section of the light-guide from a first configuration to a second configuration, and by an imaging lens.

REFERENCES:
patent: 3753607 (1973-08-01), Kitano et al.
patent: 4414344 (1968-12-01), Mukojima
patent: 4641912 (1987-02-01), Goldenberg
patent: 4732448 (1988-03-01), Goldenberg
patent: 4824209 (1989-04-01), Bolton et al.

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