Thin film transistor array and method of manufacturing same

Details Thin film transistor array and method of manufacturing same Thin film transistor array and method of manufacturing same

1992-02-12

1992-11-24

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437101, 437909, H01L 21336

Patent

active

051660865

ABSTRACT:
A self-aligned TFT array for liquid crystal display devices and a method of manufacturing the array are disclosed. A protective insulating layer on a semiconductor layer is exactly aligned with a gate electrode. A self-alignment method is used for patterning the protective insulating layer and an impurity-doped semiconductor layer on the semiconductor layer. No lift-off process is necessary.

REFERENCES:
patent: 4386352 (1983-05-01), Nonomura et al.
patent: 4601097 (1986-07-01), Shimbo
patent: 4609930 (1986-09-01), Yamazaki
patent: 4618873 (1986-10-01), Sasano et al.
patent: 4624737 (1986-11-01), Shimbo
patent: 4685195 (1987-08-01), Szydlo et al.
patent: 4700458 (1987-10-01), Suzuki et al.
patent: 4788157 (1988-11-01), Nakamura
patent: 4821092 (1989-04-01), Noguchi
patent: 4862234 (1989-08-01), Koden
patent: 4938567 (1990-07-01), Chartier
patent: 4961629 (1990-10-01), Kato
"Application of Amorphous Silicon Field Effect Transistors in Addressable Liquid Crystal Display Panels", Snell et al., Applied Physics, 1981, pp. 357-362.

Affiliated with

Also associated with

Rating

Thin film transistor array and method of manufacturing same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film transistor array and method of manufacturing same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film transistor array and method of manufacturing same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-921422