Liquid indium source

Details Liquid indium source Liquid indium source

1993-07-27

1996-03-26

Dees, Jose/ G.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C07F 500

Patent

active

055022278

ABSTRACT:
A uniform dosimetry of vapor phase trimethylindium is provided by dissolving trimethylindium in a C.sub.3 -C.sub.5 trialkylindium and bubbling an inert carrier gas through the solution.

REFERENCES:
patent: 4720560 (1988-01-01), Hui et al.

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