Method of forming light beam and method of fabricating semicondu

Fishing – trapping – and vermin destroying

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H01L 2126

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055020011

ABSTRACT:
Technology for forming a fine light beam having a size smaller than the theoretical limit determined by the wavelength of light and characteristics of an objective lens. A beam distribution shifter having two light transmission regions is disposed between a source of light and an objective lens, a phase shifter is provided on one of the two light transmission regions to divide the light passing through the beam distribution shifter into two light fluxes having phases opposite to each other, and the two light fluxes are focused through the objective lens to form a fine light beam having a size smaller than the theoretical limit determined by the wavelength of the light and characteristics of the objective lens due to destructive interference between the two light fluxes.

REFERENCES:
patent: 4791650 (1988-12-01), Tatsuno et al.
J. I. Raffel, et al "Laser Programmed VIAS for Restructurable VLSI" IEEE International Electron Devices Meeting, Dec. 1980 pp. 132-135.
F. A. Jenkins & H. E. White, Fundamentals of Optics, 4th Ed., McGraw-Hill, New York, NY (1976) pp. 270-285.

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