Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1994-05-27
1996-03-26
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430322, 430323, 216 48, G03F 900
Patent
active
055019250
ABSTRACT:
A method and apparatus for the production of transparent phase reticule mask for projecting high intensity light--such as that used for direct laser ablation of materials from substrates--is disclosed. The transparent phase reticule mask includes first portions which are for scattering light beyond the solid angle of an imaging system and second transparent portions which scatter light to an angle where projection by an imaging system can occur. Phase reticule mask configurations are disclosed including a known phase reticule mask which has gratings, and a new phase reticule mask having random phase roughening for the scattering of light. Random phase roughening includes imparting to the roughened area a mean solid angle of scattering that exceeds the solid angle of collection of an image system. Thus, the total fraction of incident light is below the ablation threshold and constitutes the dark patterned region of the mask. Techniques for fabrication are disclosed with include constructively/destructively interfering waves for patterning photoresist for the formation of half wave gratings, and phase roughening utilizing a speckle pattern exposure. In each case, exposure of transparent portions of the mask from the opposite side of the mask renders the double exposed portion of the mask suitable for light transmission with the remaining portions of the mask for light scattering. A method of phase roughening is also disclosed which includes exposure of the blocking area of the mask to an acid etch to impart the blocking regions of the mask.
REFERENCES:
patent: 4684436 (1987-08-01), Burns et al.
patent: 4923772 (1990-05-01), Kirch et al.
patent: 5328785 (1994-07-01), Smith et al.
Hunter, Jr. Robert O.
McArthur Bruce B.
Smith Adlai H.
Litel Instruments
Rosasco S.
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