Patent
1984-04-19
1985-07-09
Larkins, William D.
357 51, 357 68, G11C 1140, H01L 2704, H01L 2352
Patent
active
045285837
ABSTRACT:
A programmable semiconductor device having a microswitch (11) which over a part of its length is provided separately from a bridging conductor (10), for example, a word line and a supporting element. Since the dimensions of the switch (11) and the conductor (10) are independent of each other, the resistance of the conductor (10) may be low so that programmable memories having a high read-in and read-out rate are obtained. In addition the circuit element, for example a Schottky diode (3, 8) can be realized below the bridging part (12) of the conductor (10), which results in a high bit density. Since the switch (11) is present below the conductor (10) the assembly can be passivated in the unprogrammed state by means of a protective layer (20), so that the switch 11 is encapsulated in a hollow space (21).
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Petersen, IBM Technical Disclosure Bulletin, vol. 20, No. 12, May 1978, p. 5309.
Slob Arie
Te Velde Ties S.
Cannon, Jr. James J.
Haken Jack E.
Larkins William D.
U.S. Philips Corporation
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