1986-08-21
1989-08-08
Edlow, Martin H.
357 30, H01L 4500
Patent
active
048557951
ABSTRACT:
A photosensor comprises an insulating substrate, an electrode, a photoconductor layer composed of a hydrogenated amorphous silicon semiconductor layer obtained by the glow discharge decomposition of monosilane gas, a junction stabilizing layer composed of a boron-containing hydrogenated amorphous silicon semiconductor which is obtained by the glow discharge decomposition of a mixed gas of monosilane and diborane, a transparent electrode and a transparent protective layer, these elements being laminated in that order. The insertion of the junction stabilizing layer between the photoconductor layer and the transparent electrode greatly improves the dark current characteristic. The electrode, the photoconductor layer and the junction stabilizing layer can be divided in correspondence with each picture element, thereby improving the resolution of the photosensor.
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"Amorphous Silicon Solar Cell", Carlson et al. Applied Physics Letters vol. 28, No. 11, 1976, pp. 671-673.
Matsumaru Haruo
Sasano Akira
Tanaka Yasuo
Tsukada Toshihisa
Yamamoto Hideaki
Edlow Martin H.
Hitachi , Ltd.
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