Abrading – Machine – Rotary tool
Patent
1998-04-10
2000-09-12
Rachuba, M.
Abrading
Machine
Rotary tool
451289, 451290, 451443, B24B 500
Patent
active
061169943
ABSTRACT:
A compact polishing apparatus has been developed which can be installed in a relatively small space, and is highly rigid without increasing the weight of the apparatus. The polishing apparatus comprises a polishing table, a top ring head for rotatably holding a substrate, a substrate transfer device for transferring the substrate to and from a substrate storage section, a substrate delivery device for delivery of the substrate between the top ring head and the substrate transfer device at a delivery position outside of the polishing table. A guide rail device is laid between the polishing table and the substrate delivery device, and a carriage device movable along the guide rail device is provided for carrying the top ring device thereon.
REFERENCES:
patent: 3978622 (1976-09-01), Mazur et al.
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5498196 (1996-03-01), Karlsrud et al.
patent: 5618227 (1997-04-01), Tsutumi et al.
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5660581 (1997-08-01), Shin et al.
patent: 5679055 (1997-10-01), Greene et al.
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5908347 (1999-06-01), Nakajima et al.
patent: 5989107 (1999-11-01), Shimizu et al.
Pending U.S. application No. 08/857,252, filed May 16, 1997, by Noburu Shimizu et al., entitle "Method for Polishing Workpieces and Apparatus Therefor", located in Group Art Unit 3723.
Aizawa Hideo
Ito Kenya
Ebara Corporation
Rachuba M.
LandOfFree
Polishing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Polishing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-90796