Pneumatic energy fluxmeter

Details Pneumatic energy fluxmeter Pneumatic energy fluxmeter

Filed on

1992-04-02

Date issued

1992-10-27

Examiner

Karlsen, Ernest F.

Patent Class

Electricity: measuring and testing

SubClass

Measuring, testing, or sensing electricity, per se

SubSubClass

With rotor

Other Related Categories

156626, H01L 21306

Type

Patent

Status

active

Patent number

051592673

Description

ABSTRACT:
A fluxmeter which provides for a pneumatic apparatus for measuring an amount of plasma energy flux flowing into a semiconductor wafer provides for a non-electrical apparatus of measuring energy flux. A bulb has one end exposed to the plasma while the opposite end is supported by a heat sink. When plasma is applied, gas pressure in the bulb changes due to a change in temperature. This change in gas pressure is measured to provide a direct correlation to a value of energy flux impinging on the fluxmeter.

REFERENCES:
patent: 3511727 (1970-05-01), Hays
patent: 4115184 (1978-09-01), Poulsen
patent: 4263088 (1981-04-01), Gorin
patent: 4598247 (1986-07-01), Mako et al.
patent: 4615755 (1986-10-01), Tracy
"The Electron Art", by Rockett, Electronics, Sep. 1948 p. 124.
Patent Abstracts of Japan, vol. 8, No. 141 (P-283)(1578) Jun. 30,1984 and JP,A,59040219 (Matsushita) Mar. 5, 1984.
World Patent Index Latest Section ch, Wk 8142, Derwent Pub Ltd, London, GB; Class C, AN 81-77364D & SU,A,798282 (Azerb Petro) Jan. 23, 1981.
Instruments and Experimental Techniques, vol. 31, No. 2, Mar. 1988, N.Y., US, pp. 410-412; Kulik et al: `Method For Measurement of Thermal-Flux Distribution In Low-Temperature Plasma`.
Journal of Physics D. Applied Physics, vol. 11, No. 3, Feb. 1978, Letchworth GB Erents et al: `A novel technique for measurement of energetic hydrogen flux to the walls in fusion devices`.

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