Multiple level miniature electromechanical accelerometer switch

Electricity: circuit makers and breakers – Special application – Change of inclination or of rate of motion responsive

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200 6148, 200 6151, H01H 3514

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active

048555444

ABSTRACT:
An accelerometer switch which has cantilever beams carrying integral end masses formed in a silicon die which is sandwiched between a contact plate and a support plate. Each beam provides switching at a different threshold acceleration level. The fixed contact face of the contact plate is configured with a relief space to permit accelerometer switch operation even though the input acceleration is off-normal and there is twisting of the accelerometer beam.

REFERENCES:
patent: 3389236 (1968-06-01), Guthart
patent: 3764820 (1973-10-01), White et al.
patent: 4138604 (1979-02-01), Harmser et al.
patent: 4356730 (1982-11-01), Cade
patent: 4543457 (1985-09-01), Petersen et al.
patent: 4673777 (1987-06-01), Bai et al.
patent: 4737660 (1988-04-01), Allen et al.
K. E. Petersen, "Micromechanical Membrane Switches on Silicon," pp. 376-385, IBM J. Res. Develop, vol. 23, No. 4 (Jul. 1979).
L. M. Roylance and J. B. Angell, "A Batch-Fabricated Silicon Accelerometer," pp. 1911-1917, IEEE Transactions on Electron Devices, vol. Ed-26, No. 12 (Dec. 1979).
L. Holland, et al; "Bottom Contact Micromechanical Switching Geometry"; IBM Technical Disclosure Bulletin; vol. 21, No. 3, Aug. 1978, pp. 1207, 1208.

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