Laser sputtering apparatus

Details Laser sputtering apparatus Laser sputtering apparatus

1990-12-14

1992-10-27

Albritton, C. L.

Electric heating

Metal heating

By arc

21912174, 21912175, B23K 2600

Patent

active

051591693

ABSTRACT:
A laser sputtering apparatus comprising: a laser oscillator for emitting a pulsed laser beam; an optical unit for uniforming intensity of the laser beam; a vacuum tank which contains a target; and an optical system for irradiating the laser beam onto the target through the optical unit.

REFERENCES:
patent: 4758533 (1988-07-01), Magee et al.
patent: 5017277 (1991-05-01), Yoshida et al.
patent: 5055653 (1991-10-01), Funami et al.

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