Method and apparatus for an optical sensor utilizing semiconduct

Coating processes – Optical element produced

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427 86, 427379, 350317, 432 18, 356419, B05D 506

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active

044016948

ABSTRACT:
A method and resulting apparatus for implementing a unique optical sensor that is adapted to be interfaced with a low cost, compact fiber-optic transmission system to provide an accurate indication of a sensed physical parameter (e.g. temperature) of a remote sample. The sensor is fabricated so as to include a semiconductor material that has optical-wavelength-dependent filter characteristics that may be varied as a function of a physical parameter such as temperature.
In one embodiment, a graded optical filter fabricated by using thin-film deposition techniques on an amorphous semiconductor material, provides position responsive high-pass filter characteristics. Such filter characteristics are then utilized by moving a light source as a function of a physical parameter and generating an optical signal therefrom having a cutoff frequency dependent upon the position of the light source.
In another embodiment, the temperature dependent frequency cutoff characteristics in the absorption edge of amorphous selenium, are utilized more directly in an optical temperature sensor. The optical utilization of amorphous semiconductor material is a particularly advantageous feature of the invention in reducing the cost and complexity of semiconductor optical filters.

REFERENCES:
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patent: 4136566 (1979-01-01), Christensen
patent: 4278349 (1981-07-01), Sander
Kachurin et al., "Annealing of Defects in Ion-Implanted Layers by Pulsed Laser Radiation", Ion Implantation in Semiconductors, (New York, Plenum Press, 1976), pp. 445-451.
"Piezoelectric Films", Thin Film Phenomena (New York, McGraw-Hill Bk. Co., 1969), pp. 477-479.
Electronics Engineer's Handbook, 1st edition, New York, McGraw-Hill Bk. Co., 1975, pp. 8-78 to 8-79.
Handbook of Chemistry and Physics, 14th edition, Cleveland, Ohio, Chemical Rubber Publishing Co., 1958, p. 1958.

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