Semiconductor pressure transducer

Details Semiconductor pressure transducer Semiconductor pressure transducer

1982-12-30

1985-07-09

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73706, 73718, 338 4, G01L 906

Patent

active

045274282

ABSTRACT:
A semiconductor pressure transducer including a measuring diaphragm of semiconductor material for sensing pressure supported by a support member of the same material. An oxide layer and a thin glass layer are interposed between the measuring diaphragm and the support member.

REFERENCES:
patent: 3397278 (1968-08-01), Pomerantz
patent: 3873956 (1975-03-01), Kurtz
patent: 3922705 (1975-11-01), Yerman
patent: 4065971 (1978-01-01), Shimazoe
patent: 4257274 (1981-03-01), Shimada
patent: 4291293 (1981-09-01), Yamada
patent: 4303903 (1981-12-01), Matsuoka
patent: 4364276 (1982-12-01), Shimazoe
patent: 4405970 (1983-09-01), Swindal

Affiliated with

Also associated with

Rating

Semiconductor pressure transducer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor pressure transducer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor pressure transducer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-902913