Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-01-20
1999-07-06
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350412, G01P 904
Patent
active
059200111
ABSTRACT:
A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).
REFERENCES:
patent: 2544646 (1951-03-01), Barnaby et al.
patent: 3062059 (1962-11-01), Singleton
patent: 4102202 (1978-07-01), Ferries
patent: 4336718 (1982-06-01), Washburn
patent: 4372173 (1983-02-01), EerNisse et al.
patent: 4445376 (1984-05-01), Merhav
patent: 4467651 (1984-08-01), Peters et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4510802 (1985-04-01), Peters
patent: 4512192 (1985-04-01), Peters
patent: 4517841 (1985-05-01), Peters et al.
patent: 4522062 (1985-06-01), Peters
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4541105 (1985-09-01), Lee et al.
patent: 4553436 (1985-11-01), Hansson
patent: 4583404 (1986-04-01), Bernard et al.
patent: 4584885 (1986-04-01), Cadwell
patent: 4590801 (1986-05-01), Merhav
patent: 4592233 (1986-06-01), Peters
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4599896 (1986-07-01), Stewart
patent: 4628735 (1986-12-01), Kirkpatrick
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4660418 (1987-04-01), Greenwood et al.
patent: 4665748 (1987-05-01), Peters
patent: 4679434 (1987-07-01), Stewart
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4706259 (1987-11-01), Paros et al.
patent: 4711128 (1987-12-01), Boura
patent: 4712426 (1987-12-01), Peters
patent: 4712427 (1987-12-01), Peters
patent: 4727752 (1988-03-01), Peters
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4750363 (1988-06-01), Norling
patent: 4750364 (1988-06-01), Kawamura et al.
patent: 4766768 (1988-08-01), Norling et al.
patent: 4782700 (1988-11-01), Hulsing
patent: 4786861 (1988-11-01), Hulsing, II et al.
patent: 4788864 (1988-12-01), Pier
patent: 4799385 (1989-01-01), Hulsing et al.
patent: 4810922 (1989-03-01), Hirsch
patent: 4811602 (1989-03-01), Hulsing
patent: 4814680 (1989-03-01), Hulsing
patent: 4821572 (1989-04-01), Hulsing, II
patent: 4841773 (1989-06-01), Stewart
patent: 4848156 (1989-07-01), Hulsing
patent: 4864861 (1989-09-01), Hulsing
patent: 4870588 (1989-09-01), Merhav
patent: 4872342 (1989-10-01), Hanson et al.
patent: 4872343 (1989-10-01), Peters et al.
patent: 4879914 (1989-11-01), Norling
patent: 4881408 (1989-11-01), Hulsing et al.
patent: 4882933 (1989-11-01), Peterson et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4891982 (1990-01-01), Norling
patent: 4891983 (1990-01-01), Stewart
patent: 4891984 (1990-01-01), Fujii et al.
patent: 4896268 (1990-01-01), MacGugan
patent: 4901586 (1990-02-01), Blake et al.
patent: 4912990 (1990-04-01), Norling
patent: 4918277 (1990-04-01), Zimmer
patent: 4920801 (1990-05-01), Church
patent: 4922756 (1990-05-01), Henrion
patent: 4928203 (1990-05-01), Swindal et al.
patent: 4930351 (1990-06-01), Macy et al.
patent: 4945765 (1990-08-01), Roszhart
patent: 4955108 (1990-09-01), Pier
patent: 4987780 (1991-01-01), Abbink et al.
patent: 4996877 (1991-03-01), Stewart
patent: 5006487 (1991-04-01), Stokes
patent: 5007289 (1991-04-01), Stewart et al.
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5056366 (1991-10-01), Fersht et al.
patent: 5065627 (1991-11-01), Stewart et al.
patent: 5205171 (1993-04-01), O'Brian et al.
patent: 5241862 (1993-09-01), Abbink et al.
patent: 5253524 (1993-10-01), Abbink et al.
patent: 5277053 (1994-01-01), McLane et al.
patent: 5392650 (1995-02-01), O'Brian et al.
patent: 5428995 (1995-07-01), Fersht
patent: 5428996 (1995-07-01), Abbink et al.
Pisano, Albert P., "Resonant-Structure Micromotors," Micro Electro Mechanical Systems, Feb. 20-22, 1989, IEEE Catalog No. 89THO249-3, pp. 44-48.
Tang, William C., et al, "Laterally Driven Polysilicon Resonant Microstructures," Micro Electro-Mechanical Systems, Feb. 20-22, 1989 IEEE Catalog No. 89THO249-3, pp. 53-59.
RoyLance, L., et al., "A Batch-Fabricated Silicon Accelerometer," IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.
Angell, J., et al., "Silicon Micromechanical Devices," Scientific American, Apr., 1983, pp. 44-55.
Goodenough, F., "Airbags Boom When IC Accelerometer Sees 50G," Electronic Design, Aug. 8, 1991, pp. 45-56.
Allied-Signal Inc.
Chapman John E.
LandOfFree
Micromachined rate and acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromachined rate and acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined rate and acceleration sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-900746