Scanning microscope and tuning fork scanning mechanism for varyi

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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250235, G02B 2610

Patent

active

052142795

ABSTRACT:
A scanning microscope comprises a sample supporting member on which a sample is supported, an optical device which irradiates a light beam to the sample, and a movement mechanism which moves the optical device with respect to the sample supporting member such that the light beam scans the sample. A device photoelectrically detects light radiated out of the portion of the sample, which is exposed to the light beam, an image of the sample being thereby formed. The movement mechanism for moving the optical device or the sample supporting member is constituted of a tuning fork on which the optical device or the sample supporting member is supported, and an excitation device for applying force, the magnitude of which changes periodically, to the tuning fork, and thereby causing the tuning fork to resonate.

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patent: 3628781 (1971-12-01), Grib
patent: 3666974 (1972-05-01), Dostal
patent: 3727151 (1972-04-01), Koehler
patent: 4859846 (1989-08-01), Burrer
patent: 4902083 (1990-02-01), Wells
patent: 5009473 (1991-04-01), Hunter et al.
patent: 5081350 (1992-01-01), Iwasaki

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