Method of making durable photomasks with metal ion diffusion

Details Method of making durable photomasks with metal ion diffusion Method of making durable photomasks with metal ion diffusion

1978-08-03

1979-09-18

Kimlin, Edward C.

Gas separation: apparatus

Electric field separation apparatus

Electrode cleaner, apparatus part flusher, discharger, or...

96 36, 96 34, 427165, 428210, G03C 500, G03C 1100

Patent

active

041681681

ABSTRACT:
A method of producing a durable photomask comprising,

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patent: 3732792 (1973-05-01), Tarnopol et al.
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patent: 3960560 (1976-06-01), Sato
patent: 3966473 (1976-06-01), Sato
patent: 4110114 (1978-08-01), Sato
patent: 4113486 (1978-09-01), Sato

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