Fishing – trapping – and vermin destroying
Patent
1987-04-30
1989-03-14
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437194, 437200, 357 67, 427102, 307306, 338195, H01L 1100
Patent
active
048124192
ABSTRACT:
A via connection and method for making the same for integrated circuits having multiple layers of electrically conductive interconnect lines separated by an insulative layer. The via connection is characterized by a very thin layer of high resistivity material lining the via hole in conductive contact with interconnect lines in two layers. The resistivity of the thin layer material is in a range from about 10 to about 50 times the interconnect line resistivities and generally has a thickness of less than 100 nanometers. The thin layer assures more uniform current flow in the via connection thereby preventing electromigration, with reduced peak local current density by causing current to swing more widely around the corner at the interface between the interconnect lines at the via.
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Lee Keunmyung
Nishi Yoshio
Hearn Brian E.
Hewlett--Packard Company
Howard William H. F.
Pawlikowski Beverly A.
Wong Edward Y.
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