Single plate corrector for stepper lens train

Details Single plate corrector for stepper lens train Single plate corrector for stepper lens train

1997-03-07

1999-07-27

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

059299916

ABSTRACT:
A stepper lens train is mapped for curvature of field and distortion. A single plate, displaced from the reticle plane, is utilized for stepper correction. The plate is provided with a variable thickness mapped to correct curvature of field. The same plate is etched with stepped gratings typically on a flat surface of the plate.

REFERENCES:
patent: 5392119 (1995-02-01), McArthur et al.

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