Chemistry: electrical and wave energy – Apparatus – Electrolytic
Patent
1996-02-08
1998-11-17
Tung, T.
Chemistry: electrical and wave energy
Apparatus
Electrolytic
65 40, 1562722, 1562739, 204435, 216 41, 216 97, 216 99, G01N 2736
Patent
active
058371133
ABSTRACT:
A small glass electrode and process for preparation thereof, the small glass electrode having a bonded structure and comprising a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, the pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCA, or HCA, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. The structure of the small glass electrode may be produced by the disclosed process easily and at low cost. Additionally, the small glass electrode, in differing embodiments, may include a reference electrode and a temperature sensor.
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Kojima Naomi
Sugama Akio
Suzuki Hiroaki
Fujitsu Limited
Tung T.
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