Method of cleaning a charged beam apparatus

Details Method of cleaning a charged beam apparatus Method of cleaning a charged beam apparatus

1992-07-02

1994-05-17

Pal, Asok

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

156626, 156643, 156644, B08B 700, H01L 21465

Patent

active

053125193

ABSTRACT:
A method of cleaning a charged beam irradiating apparatus having a part exposed to a charged beam in a vacuum chamber to contaminate the part with organic contaminations, the method including the selective introduction of electrically neutral active species into the vacuum chamber, after it has been exhausted, to remove the contaminations from the part by exposure to the introduced neutral active species. The neutral active species are formed outside of the chamber in a plasma discharging gas with other species including electrons or positive ions. Only the electrically active neutral species are selected for introduction into the evacuated container.

REFERENCES:
patent: 4192706 (1980-03-01), Horiike
patent: 5016663 (1991-05-01), Mase et al.
patent: 5169407 (1992-12-01), Mase et al.

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