Surgery – Means for introducing or removing material from body for... – Treating material introduced into or removed from body...
Patent
1997-06-30
1999-07-27
Coggins, Wynn Wood
Surgery
Means for introducing or removing material from body for...
Treating material introduced into or removed from body...
606222, 606223, 606181, A61M 532
Patent
active
059282070
ABSTRACT:
A microneedle includes an elongated body with a top surface, a bottom surface, a first side wall between the top surface and the bottom surface, and a second side wall between the top surface and the bottom surface. An end is defined by the bottom surface converging into a tip, an isotropically etched portion of the first side wall converging into the tip, and an isotropically etched portion of the second side wall converging into the tip. The elongated body is less than approximately 700 .mu.m wide and less than approximately 200 .mu.m thick. The elongated body may incorporate a fluid channel. The elongated body may be formed of silicon that is not doped with Boron. In such a configuration, integrated circuitry or a micromachined device, such as a heater or pump may also be formed on the device. A number of novel processing techniques are associated with the fabrication of the device. The device may be formed by relying solely on isotropic etching. Alternately, a combination of isotropic and anisotropic etching may be used. Unlike prior art micromachined devices, the disclosed device may be processed at relatively low temperatures below 1100.degree. C. and without using the carcinogen ethylenediamin pyrocatechol.
REFERENCES:
patent: 5030228 (1991-07-01), Wong et al.
patent: 5178628 (1993-01-01), Otsuka et al.
patent: 5263974 (1993-11-01), Matsutani et al.
patent: 5342397 (1994-08-01), Guido
patent: 5464422 (1995-11-01), Silverman
patent: 5591139 (1997-01-01), Lin et al.
Chen et al., "A Multichannel Neural Probe for Selective Chemical Delivery at the Cellular Level", IEEE Transactions on Biomedical Engineering, 44(8):760-769 (1997).
Takahashi et al., "Integration of Multi-Microelectrode and Interface Circuits by Silicon Planar and Three-Dimensional Fabrication Technology", Sensors and Actuators, 5:89-99 (1984).
Wise et al., "An Integrated-Circuit Approach to Extracellular Microelectrodes", IDDD Transactions on Bio-Medical Engineering, BME-17(3):238-247.
Banks et al., "Intraneural Extracellular Recording from Locust Peripheral Nerve with Thin-Film Microelectrodes: Methods and Results", Proceedings of 16th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Baltimore, MD USA, pp. 798-799, vol. 2, Nov. 3-6, 1994.
Blum et al., "Multi-Microelectrode Probe for Neurophysiological Experiments", Proceedings of the 14th Annual NE Bioengineering Conference (IEEE Cat. No. 88-CH2666-6) Durham, NH USA, pp. 15-18, Mar. 10-11, 1988.
Chen and Wise, "A Multichannel Neural Probe for Selective Chemical Delivery at the Cellular Level", Solid-State Sensor and Actuator Workshop, Hilton Head, SC USA, pp. 256-259, Jun. 13-16, 1994.
Ensell et al., "Silicon-Based Microelectrodes for Neurophysiology Fabricated Using a Gold Metallization/Nitride Passivation System", J. Microelectromechanical Systems, 5(2):117-121 (1996).
Lin et al., "Silicon Processed Microneedles", The 7th International Conference on Solid-State Sensors and Actuators, Transducers '93, Yokohama Japan, pp. 237-240, Jun. 7-10, 1993.
Lin et al., "Vapor Bubble Formation on a Micro Heater in Confined and Unconfined Micro Channels", HTD-vol. 253, Heat Transfer on the Microscale, ASME 1993, pp. 85-93.
Najafi et al., "A High-Yield IC-Compatible Multichannel Recording Array", IEEE Transactions on Electron Devices, ED-32(7):1206-1211 (1985).
Takahashi and Matsuo, "Integration of Multi-Microelectrode and Interface Circuits by Silicon Planar and Three-Dimensional Fabrication Technology", Sensor and Actuators, 5:89-99 (1984).
Takahashi et al., "A Multimicroelectrode Fabricated by Silicon Dry Etching", Electronics and Communications in Japan, 2:70(4):86-92 (1987).
Lebouitz Kyle S.
Pisano Albert P.
Coggins Wynn Wood
Galliani William S.
Gring N. Kent
The Regents of the University of California
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