Fluid control device

Details Fluid control device Fluid control device

1999-06-25

2000-09-12

Fox, John

Fluid handling

Systems

With flow control means for branched passages

137613, F16K 1110

Patent

active

061162825

ABSTRACT:
A massflow controller and block valves are each fastened to block couplings adjacent to each other by screw members screwed in from above like a bridge and are thereby made removable upward. The block couplings are fastened to a base plate by screw members left uncovered with the fluid control members when seen from above.

REFERENCES:
patent: 3152614 (1964-10-01), Carls
patent: 3817269 (1974-06-01), Raymond
patent: 5819782 (1998-10-01), Itafuji
patent: 5983933 (1999-11-01), Ohmi et al.
patent: 5988217 (1999-11-01), Ohmi et al.

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