Substrate transport apparatus

Details Substrate transport apparatus Substrate transport apparatus

1997-09-30

1999-12-14

Grant, William

Boots, shoes, and leggings

395 88, 36416703, 414730, 901 30, 901 46, G05B 1500

Patent

active

060028408

ABSTRACT:
A substrate transport apparatus comprising a robot transport arm and a substrate aligner located on the robot transport arm.

REFERENCES:
patent: 4715921 (1987-12-01), Maher et al.
patent: 4980971 (1991-01-01), Bartschat et al.
patent: 5004399 (1991-04-01), Sullivan et al.
patent: 5224809 (1993-07-01), Maydan et al.
patent: 5431529 (1995-07-01), Eastman et al.
patent: 5483138 (1996-01-01), Shmookler et al.
patent: 5497007 (1996-03-01), Uritsky et al.
patent: 5512320 (1996-04-01), Turner et al.
patent: 5537311 (1996-07-01), Stevens
patent: 5563798 (1996-10-01), Berken et al.

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