Microelectromechanics-based frequency signature sensor

Details Microelectromechanics-based frequency signature sensor Microelectromechanics-based frequency signature sensor

1996-12-23

1999-01-05

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310331, 310309, H01L 4108

Patent

active

058567224

ABSTRACT:
An acoustic filter array of microelectromechanical beams each having a characteristic resonance frequency response to mechanical and/or acoustical vibration. The array divides incoming acoustic signals into a plurality of discrete spectral components, each of which may be separately detected and converted into corresponding electrical signals. The acoustic filter may be integrated onto a single crystal silicon substrate with electrical circuity for performing acoustic signal processing functions required for applications such as speech processing and simulating the physiological function of the ear.

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"Micro Electromechanical Filters for Signal Processing" Lin, et al.; Feb. 1992; pp. 226-231.

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