Waferless boat used as baffle during wafer processing

Details Waferless boat used as baffle during wafer processing Waferless boat used as baffle during wafer processing

1997-06-05

1999-12-14

Breneman, Bruce

Coating apparatus

Gas or vapor deposition

118725, C23C 1600

Patent

active

060011823

ABSTRACT:
In the course of processing integrated circuits production wafers are placed within a plurality of production boats on a platform. A first baffle boat is placed at a front end of the plurality of production boats. The first baffle boat contains a first plurality of wafers made of quartz. A second baffle boat is placed at a rear end of the plurality of production boats. The second baffle boat contains a second plurality of wafers made of quartz. The plurality of production boats, the first baffle boat and the second baffle boat are placed within a processing chamber.

REFERENCES:
patent: 5020476 (1991-06-01), Bay et al.
patent: 5064367 (1991-11-01), Philipossian
patent: 5409539 (1995-04-01), Turner et al.
patent: 5645417 (1997-07-01), Smith
patent: 5683513 (1997-11-01), Fujimaki

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