Method of producing thin-film transistor array

Details Method of producing thin-film transistor array Method of producing thin-film transistor array

1984-10-29

1986-07-22

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29578, 29580, 148 15, 357 4, 357 30, 357 84, H01L 2978, G02F 1133

Patent

active

046010971

ABSTRACT:
A method of manufacturing a thin film transistor array is simplified by processes to form source and drain electrodes at least of ITO film for pixel electrodes on a gate insulating film covering gate electrode and to form islands of an amorphous semiconductor film and a light shield film in the same masking process on the source and the drain electrodes.

REFERENCES:
patent: 3490943 (1970-01-01), Werdt
patent: 4065781 (1977-12-01), Gutknecht
patent: 4404578 (1983-09-01), Takafuji et al.
patent: 4412234 (1983-10-01), Matsuda et al.
patent: 4425572 (1984-01-01), Takafuji et al.

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