Phase shifting interferometer

Details Phase shifting interferometer Phase shifting interferometer

1997-05-23

1999-08-03

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 356351, 356359, 356360, G01B 902

Patent

active

059332360

ABSTRACT:
An interferometer which has the capability of measuring optical elements and systems with an accuracy of .lambda./1000 where .lambda. is the wavelength of visible light. Whereas current interferometers employ a reference surface, which inherently limits the accuracy of the measurement to about .lambda./50, this interferometer uses an essentially perfect spherical reference wavefront generated by the fundamental process of diffraction. Whereas current interferometers illuminate the optic to be tested with an aberrated wavefront which also limits the accuracy of the measurement, this interferometer uses an essentially perfect spherical measurement wavefront generated by the fundamental process of diffraction. This interferometer is adjustable to give unity fringe visibility, which maximizes the signal-to-noise, and has the means to introduce a controlled prescribed relative phase shift between the reference wavefront and the wavefront from the optics under test, which permits analysis of the interference fringe pattern using standard phase extraction algorithms.

REFERENCES:
patent: 4353650 (1982-10-01), Sommargren
patent: 4872755 (1989-10-01), Kuchel
patent: 5076695 (1991-12-01), Ichibara

Affiliated with

Also associated with

Rating

Phase shifting interferometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Phase shifting interferometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Phase shifting interferometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-854641