Method of fabricating semiconductor device

Details Method of fabricating semiconductor device Method of fabricating semiconductor device

1988-11-07

1989-07-04

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 73, 437 67, 437978, 156644, 156647, 156650, 156662, 148DIG43, 148DIG51, 148DIG117, H01L 21306

Patent

active

048450480

ABSTRACT:
A method of fabricating a semiconductor device which includes:

REFERENCES:
patent: 4008107 (1977-02-01), Hayasaka et al.
patent: 4271583 (1981-06-01), Kahng et al.
patent: 4272776 (1981-06-01), Weijland et al.
patent: 4278705 (1981-07-01), Agraz-Guerena et al.
patent: 4361600 (1982-11-01), Brown
patent: 4502913 (1985-03-01), Lechaton et al.
patent: 4551743 (1985-11-01), Murakami
patent: 4661832 (1987-04-01), Lechaton et al.
Ghandhi, Sorab, VLSI Fabrication Principles, John Wiley & Sons, 1983, pp. 421-429.

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