Method of making thin oxide portions particularly in electricall

Details Method of making thin oxide portions particularly in electricall Method of making thin oxide portions particularly in electricall

1992-12-10

1995-02-28

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437154, 437979, 437985, H01L 21266

Patent

active

053936841

ABSTRACT:
A method for forming thin oxide portions in electrically erasable and programmable read-only memory cells, including the use of the enhanced oxidation effect and the lateral diffusion of heavy doping, for obtaining a tunnel portion whose dimensions are smaller than the resolution of the photolithographic method used.

REFERENCES:
patent: 5198381 (1993-03-01), Chang et al.
patent: 5215934 (1993-06-01), Tzeng

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