Superprecision positioning device

Details Superprecision positioning device Superprecision positioning device

1987-02-11

1988-06-07

Skudy, R.

Electrical generator or motor structure

Dynamoelectric

Rotary

74571M, 310 80, 310 905, H02K 7705, F16C 3906, H02P 552

Patent

active

047498986

ABSTRACT:
A superprecision positioning device includes an output shaft rotor, a plurality of eccentric shaft rotors including an inner eccentric shaft rotor and an outer eccentric shaft rotor, and a bearing base cylinder, electrically rotating and driving mechanism portions being provided between the eccentric shaft rotor and the output shaft rotor, and between the outer eccentric shaft rotor and the bearing base cylinder, respectively, whereby the eccentric shaft rotors and the output shaft rotor may be independently rotated and controlled. With this arrangement, movement in three degrees of freedom may be achieved by translational movement and rotation of the output shaft in a two-dimensional surface, and if an axially movable support shaft is inserted in the output shaft, an article being positioned may be moved with four degrees of freedom in total, providing superprecision positioning in units of 1/10 micron.

REFERENCES:
patent: 2592237 (1952-04-01), Bradley
patent: 3234816 (1966-02-01), von Thuengen
patent: 3385624 (1968-05-01), Baclini
patent: 4300807 (1981-11-01), Poubeau
patent: 4375047 (1983-02-01), Nelson et al.
patent: 4560263 (1985-12-01), Katsuma et al.
patent: 4597613 (1986-07-01), Sudo
patent: 4649307 (1987-03-01), Bech
patent: 4652148 (1987-03-01), Olasz

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