Method of manufacturing semiconductor device utilizing an accumu

Details Method of manufacturing semiconductor device utilizing an accumu Method of manufacturing semiconductor device utilizing an accumu

1990-12-20

1992-07-21

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 44, 437911, 437984, 148DIG50, H01L 21338

Patent

active

051322382

ABSTRACT:
A method of manufacturing semiconductor devices by forming a U-shaped insulated gate on a substrate, etching the substrate to expose a sidewall of the U-shaped insulated gate, covering the exposed part with a masking material, forming the sidewall of the masking material only adjoining to the exposed U-shaped insulated gate, etching the substrate vertically to form a groove, forming a semiconductor region on the groove and burying a metal into the groove.

REFERENCES:
patent: 4378630 (1983-04-01), Horng et al.
patent: 4826781 (1989-05-01), Asahina et al.
patent: 4994406 (1991-02-01), Vasquez et al.

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