Method and apparatus for providing clean air

Details Method and apparatus for providing clean air Method and apparatus for providing clean air

1987-03-27

1988-06-07

Spitzer, Robert

Gas separation

Means within gas stream for conducting concentrate to collector

55 80, 55267, 55320, 55332, 55473, 55DIG18, B01D 4610

Patent

active

047493852

ABSTRACT:
A method of providing clean air to a workpiece comprises positioning the workpiece adjacent to a first opening in a conduit. The conduit includes a central segment and a peripheral segment having, respectively, the first opening and a second opening disposed at opposite ends of the conduit. The peripheral segment surrounds the central segment such that the first opening is substantially coplanar with the second opening. A laminar flow of air is created through the conduit in a direction away from the second opening and toward the first opening. The air flow is filtered through a HEPA filter supported within the conduit.

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patent: 4191543 (1980-03-01), Peters
patent: 4530272 (1985-07-01), Stokes
patent: 4662912 (1987-05-01), Perkins

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