Method of isolating vibration in exposure apparatus

Details Method of isolating vibration in exposure apparatus Method of isolating vibration in exposure apparatus

1997-02-27

1999-08-03

Williams, Hezron

Supports

With condition responsive control means

248638, 702 56, F16M 1300

Patent

active

059314419

ABSTRACT:
A method is provided for suppressing vibration of a body supported by an anti-vibration mount having a predetermined damping coefficient and a predetermined spring constant. The method includes the steps of applying a predetermined force to the body, detecting motion of the body generated in response to the predetermined force, and deriving a mechanical constant of the body from the damping coefficient and the spring constant of the anti-vibration mount and the detected motion of the body generated in response to the predetermined force. The method further includes the steps of monitoring the vibration of the body, and exerting a controlling force to the body in accordance with the monitored vibration of the body and the derived mechanical constant of the body to suppress the vibration of the body.

REFERENCES:
patent: 4083433 (1978-04-01), Geohegan, Jr. et al.
patent: 4916632 (1990-04-01), Doi et al.
patent: 4929874 (1990-05-01), Mizuno et al.
patent: 5433422 (1995-07-01), Ross et al.
patent: 5478043 (1995-12-01), Wakui
patent: 5613009 (1997-03-01), Miyazaki et al.

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