Method for producing an electronic device having a multi-layer s

Details Method for producing an electronic device having a multi-layer s Method for producing an electronic device having a multi-layer s

1986-12-24

1988-08-23

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

437 4, 437100, 437101, 437109, 430128, 427 531, 427 541, 427 74, 2041574, 20415745, 136258, H01L 2120

Patent

active

047660910

ABSTRACT:
A method for producing an electronic device having a multi-layer structure comprising one or more controlled band gap semiconductor thin layers formed on a substrate comprises forming at least one of said controlled band gap semiconductor thin layers according to the photo CVD method and forming at least one of the other constituent layers according to the method comprising introducing a gaseous starting material for film formation and a gaseous halogenic oxidizing agent having the property of oxidizing said starting material into a reaction space to effect chemical contact therebetween to thereby form a plurality of precursors including a precursor in an excited state and transferring at least one of these precursors into a film forming space communicated with the reaction space as a feed source for the constituent element of the deposited film.

REFERENCES:
patent: Re31708 (1984-10-01), Gordon
patent: 3473978 (1969-10-01), Jackson et al.
patent: 3888705 (1975-06-01), Fletcher et al.
patent: 4146657 (1979-03-01), Gordon
patent: 4239811 (1980-12-01), Kemlage
patent: 4357179 (1982-11-01), Adams et al.
patent: 4402762 (1983-09-01), John et al.
patent: 4421592 (1983-12-01), Shaskus et al.
patent: 4448801 (1984-05-01), Fukuda et al.
patent: 4459163 (1984-07-01), MacDiarmid et al.
patent: 4462847 (1984-07-01), Thompson et al.
patent: 4504518 (1985-03-01), Ovshinsky et al.
patent: 4522663 (1985-06-01), Ovshinsky et al.
patent: 4532199 (1985-07-01), Ueno et al.
patent: 4554180 (1985-11-01), Hirooka
patent: 4615905 (1986-10-01), Ovshinsky
patent: 4624736 (1986-11-01), Gee et al.
patent: 4624906 (1986-11-01), Kawamura et al.
patent: 4637938 (1987-01-01), Lee et al.
patent: 4645689 (1987-02-01), Cox
patent: 4652463 (1987-03-01), Peters
patent: 4657777 (1987-04-01), Hirooka
patent: 4689093 (1987-08-01), Ishihara et al.
patent: 4719123 (1988-01-01), Haku et al.
M. Ohnishi et al., Proceedings 6th E.C. Photovoltaic Solar Energy Conf. (1985), pp. 677-681.
H. Sakai et al., Proceedings 6th E.C. Photovoltaic Solar Energy Conf. (1985), pp. 682-686.
T. Inone et al., Appl. Phys. Lett., vol. 43, pp. 774-776 (1983).
Brodsky et al., IBM Technical Disclosure Bulletin, vol. 22, 3391 (Jan. 1980).

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