Film thickness measuring apparatus and method

Details Film thickness measuring apparatus and method Film thickness measuring apparatus and method

1976-05-17

1978-12-12

Willis, Davis L.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250338, G01J 100

Patent

active

041297814

ABSTRACT:
An optical apparatus is disclosed for measuring and monitoring the thickness of a partially transparent film, or coating, which is either self-supporting or attached to a reflecting substrate. Infra-red radiation strikes the reflecting surface at an angle of incidence which is at or near the Brewster's angle of the film material. The radiation is polarized in its plane of incidence, which must be maintained substantially parallel to any stria in the reflecting surface. The polarization may be provided by germanium plates which receive the radiation at an angle of incidence at or near the Brewster's angle of the germanium.

REFERENCES:
patent: 3355980 (1967-12-01), Mathias
patent: 3426201 (1969-02-01), Hilton et al.
patent: 3437811 (1969-04-01), Willis et al.
patent: 3824017 (1974-07-01), Galyon
patent: 3904293 (1975-09-01), Gee
patent: 3994586 (1976-11-01), Sharkins et al.
patent: 4015127 (1977-03-01), Sharkins

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