Gas discharge lamps and lasers fabricated by micromachining meth

Details Gas discharge lamps and lasers fabricated by micromachining meth Gas discharge lamps and lasers fabricated by micromachining meth

1997-05-15

1999-09-21

Patel, Ashok

Electric lamp and discharge devices

With gas or vapor

Having a particular total or partial pressure

313493, 313634, 313110, 313573, H01J 1716, H01J 6130

Patent

active

059558385

ABSTRACT:
A high pressure gas discharge lamp and the method of making same utilizing integrated circuit fabrication techniques. The lamp is manufactured from heat and pressure resistant planar substrates in which cavities are etched, by integrated circuit manufacturing techniques, so as to provide a cavity forming the gas discharge tube. Electrodes are deposited in the cavity. The cavity is filled with gas discharge materials such as mercury vapor, sodium vapor or metal halide. The substrates are bonded together and channels may be etched in the substrate so as to provide a means for connection to the electrodes. Electrodeless RF activated lamps may also be fabricated by this technique. Lamps fabricated from three or more planar substrates are disclosed.

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