Conformal method of fabricating an optical waveguide on a semico

Details Conformal method of fabricating an optical waveguide on a semico Conformal method of fabricating an optical waveguide on a semico

1992-04-30

1993-08-24

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

4271263, 385 8, 437129, H01L 21469, B05D 512

Patent

active

052388778

ABSTRACT:
A method for fabricating a conformal optical waveguide on a semiconductor bstrate which results in an improved conformal processing method of producing ferroelectic ceramic waveguides that is integratable with conventional electronic and optoelectronic devices. First, a patterning of a desired waveguide configuration is made on a desired semiconductor substrate. A conformal confinement layer is fabricated in the pattern of the desired waveguide configuration on the semiconductor substrate. The conformal confinement layer has an index of refraction. Next, the method calls for a placing of a sol-gel waveguide precursor in the conformal confinement layer. Next the spin casting of a sol-gel waveguide precursor shapes a sol-gel conformal waveguide layer in the conformal confinement layer on the semiconductor substrate. The annealing of the spin cast sol-gel conformal waveguide layer forms the conformal optical waveguide which has an index of refraction that is greater than the refractive index of the conformal confinement layer.

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