Method of and apparatus for conducting analysis of buried oxides

Details Method of and apparatus for conducting analysis of buried oxides Method of and apparatus for conducting analysis of buried oxides

1997-09-30

1999-12-07

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 96, 324501, 324753, G01R 31302

Patent

active

059990066

ABSTRACT:
A beam of light is projected through an electrolyte to a SOI substrate to scan the surface of the SOI substrate. When the light passes through a pinhole in a buried oxide layer, the light excites a semiconductor layer beneath the buried oxides. An ammeter measures electric charges derived by this light excitation to indicate the presence of pinholes in the buried oxide.

REFERENCES:
patent: 4125440 (1978-11-01), Markovits
patent: 4431967 (1984-02-01), Nishioka
patent: 4473795 (1984-09-01), Wood
L.P. Allen et al., "Electrochemical Analysis of Simox Buried Oxides", Electrochemical Society Proceedings, vol. 96-3, pp. 18-27.

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