Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1997-06-06
1999-12-07
Strecker, Gerard
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
134 11, 324754, 216 70, G01R 106, H05H 100, C23F 400, B08B 500
Patent
active
059989866
ABSTRACT:
A method for cleaning probes of a probe card used for testing semiconductor wafers and an apparatus for carrying out the cleaning method. Microwave energy is supplied to and a magnetic field is impressed on a reaction gas to generate a plasma; a magnetic field source generates a magnetic field, funneling and directing the plasma toward a zone opposite a probe card; a baffle funnels the plasma toward a zone where probes of the probe card are present; and a voltage source impresses controlled DC voltages onto the probes so that the energy of ions incident on the probes exceeds a threshold energy for sputtering aluminum but not a threshold energy for sputtering tungsten.
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Mitsubishi Denki & Kabushiki Kaisha
Strecker Gerard
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