Apparatus for processing articles in a series of process solutio

Details Apparatus for processing articles in a series of process solutio Apparatus for processing articles in a series of process solutio

1983-11-08

1985-06-04

Caroff, Marc L.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134 76, B08B 310

Patent

active

045208344

ABSTRACT:
An apparatus is provided wherein solid material, such as semiconductor wafers, are sequentially transported into and out of a series of process solution containers. Process solution from each container and particulate matter is removed from the material by providing means for rotating the material in a vertical plane above each container. The apparatus includes a housing maintained substantially free of particulate matter.

REFERENCES:
patent: 2416475 (1947-02-01), Friedman
patent: 2701575 (1955-02-01), Friedman
patent: 2709010 (1955-05-01), Todd
patent: 2886046 (1959-05-01), Gal
patent: 3489608 (1970-01-01), Jacobs et al.
patent: 3674040 (1972-07-01), Howells et al.
patent: 3869313 (1975-03-01), Jones et al.
patent: 3903908 (1975-09-01), Logue et al.
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4221533 (1980-09-01), Heim et al.
patent: 4264266 (1981-04-01), Trechsel

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