Superconductor passivated by an organic film and a method for fo

Details Superconductor passivated by an organic film and a method for fo Superconductor passivated by an organic film and a method for fo

1989-02-22

1992-01-07

Ryan, Patrick J.

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505701, 505702, 505703, 505704, 428426, 428522, 428688, 428901, 428930, B32B 900

Patent

active

050792210

ABSTRACT:
A ceramic superconductor layer formed on a substrate is passivated by a plasma polymerized film formed on a surface of the ceramic superconductor layer so as to have a thickness of 0.5 to 100 nm, by a conventional plasma discharging method using an organic gas such as trifluoromethane gas. According to spectroscopic analysis, the plasma polymerized film includes fluorocarbon bonds or groupings, and further, bonding between fluorine and yttrium, barium and copper is observed at the interface between the ceramic superconductor layer and the plasma polymerized film. An electronic minute device including the ceramic superconductor layer is fabricated by conventional patterning of the ceramic superconductor layer passivated by the plasma polymerized film.

REFERENCES:
patent: 4871316 (1989-10-01), Herrell et al.
patent: 4888203 (1989-12-01), Rothchild et al.
Water Interaction with the Superconducting YBa.sub.2 Cu.sub.3 O.sub.7 Phase, Yan et al., Appl. Phys. Lett. 51(7), 8/87.
Plasma Polymerization for High T.sub.c Oxide Superconductors, Fujitsu Ltd. 1988.
Applied Physics Letters, vol. 52, No. 22, May 30, 1988, pp. 1897-1898.
Denshi John Tsushin Gakkai Gijutsu Kenkyu Hokoku, vol. 88, No. 146, 1988, pp. 19-22.
Japanese Journal of Applied Physics, vol. 27, No. 11, Nov., 1988, pp. L2088-L2090.
Applied Physics Letter, vol. 51, No. 7, Aug. 1987, pp. 532-534.
Applied Physics Letter, vol. 52, No. 1, Jan. 4, 1988, pp. 69-71.

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