Method of making a multilevel electrical airbridge interconnect

Details Method of making a multilevel electrical airbridge interconnect Method of making a multilevel electrical airbridge interconnect

1989-08-04

1990-05-01

Arbes, Carl J.

Metal working

Method of mechanical manufacture

Electrical device making

29830, 179261, 361410, 204 351, 204 384, H05K 302

Patent

active

049206397

ABSTRACT:
A method of building a multilevel electrical interconnect supported by metal pillars with air as a dielectric. The metal conductors and metal support pillars are formed using a photo-imagible polymer which serves the function of patterning and also provides a temporary support during construction.

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