Method for producing ceramic diaphragm structure

Details Method for producing ceramic diaphragm structure Method for producing ceramic diaphragm structure

1997-06-16

1999-12-07

Mayes, Curtis

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156 8912, 156256, 310324, B32B 3126, H01L 4108

Patent

active

059976713

ABSTRACT:
A ceramic diaphragm structure includes a ceramic substrate having at least one window portion, and a thin ceramic diaphragm plate laminated so as to cover the window portion, wherein the ceramic diaphragm structure is unitarily formed so that the thin ceramic diaphragm portion is protruded in the direction opposite to the window portion, and a ceramic connecting layer connects the thin ceramic diaphragm plate to the ceramic substrate. The ceramic diaphragm structure has a high resonance frequency, an enhanced strength, an excellent quality and a high reliability.

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