Method of manufacturing bipolar transistor

Fishing – trapping – and vermin destroying

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437153, 437162, 357 34, H01L 2972

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047404825

ABSTRACT:
A method of manufacturing a semiconductor device in which in order to lead out directly a base electrode (9) from an active base layer (62) through a double layer comprising a first silicon film (601) and a metal silicide film (502), a part of an emitter electrode is formed of a second silicon film (602) and a hole for a contact is provided for forming the metal silicide film (502) for the active base layer (62) utilizing the second silicon film (602) as a mask.

REFERENCES:
"A 2.1-GHz 56-mW Two-Modulus Prescaler IC Using Salicide Base Contact Technology", T. Hirao et al, Extended Abstracts of the 17th Conference on Solid State Devices and Materials, Tokyo, 1985, pp. 381-384.

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