Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1986-12-11
1987-12-22
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, 356371, G01B 902
Patent
active
047143487
ABSTRACT:
A surface is subjected to a light field whose intensity is periodically modulated in a vertical direction to evaluate a scattered light pattern. The light field is obtained from interference between a first or central beam with vertical incidence and two symmetrical laterally disposed beams with oblique incidence. All beams are focussed to a common spot if the profile is obtained by scanning the surface or are superimposed as collimated beams if large area profiling is desired. The surface is imaged onto a diaphragm which selects appropriate locations of the surface for measurements by a photodetector to record sinusoidal intensity variations that are obtained when the light is periodically shifted in a vertical direction by phase modulating the first or central beam with respect to the lateral beams.
REFERENCES:
patent: 3619023 (1971-11-01), Brooks
patent: 4298283 (1981-11-01), MaKosch et al.
patent: 4358201 (1982-11-01), MaKosch
patent: 4498771 (1985-02-01), MaKosch et al.
K. Almarzouk, "Three-Beam Interferometric Profilometer", Applied Optics, Jun. 1983, vol. 22, No. 12, pp. 1893-1897.
International Business Machines - Corporation
Koren Matthew W.
Limanek Stephen J.
Willis Davis L.
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