Laser trimming of circuit elements on semiconductive substrates

Details Laser trimming of circuit elements on semiconductive substrates Laser trimming of circuit elements on semiconductive substrates

Filed on

1981-06-09

Date issued

1983-08-16

Examiner

Albritton, C. L.

Patent Class

Electric heating

SubClass

Metal heating

SubSubClass

By arc

Other Related Categories

219121LB, 372 20, B23K 2700

Type

Patent

Status

active

Patent number

043993451

Description

ABSTRACT:
A method of laser trimming thin film resistors on semiconductive substrates wherein the laser is set to a frequency equal to or less than E.sub.g /h, where E.sub.g is the optical band-gap energy of the doped semiconductor substrate, and h is Planck's constant.

REFERENCES:
patent: 3439169 (1969-04-01), Lynch
patent: 4179310 (1979-12-01), Compton et al.
patent: 4272733 (1981-06-01), Walling et al.

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