Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-10-30
1989-06-27
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 713, 324 73R, 250310, G01R 3100, G01R 3102
Patent
active
048433306
ABSTRACT:
An electron beam system and method for testing three dimensional networks of conductors embedded in an insulating material specimen without physical contact to detect open and short circuit conditions. Top to top surface wiring is tested by irradiating the specimen with an electron beam at a first beam potential to charge the specimen while negatively biasing a grid placed above the specimen surface, and then irradiating selected portions of the specimen with an electron beam at a second beam potential to read the charge on selected conductors while applying a zero or a positive bias to the grid. In one embodiment the charge beam is a focused scanning beam and the first beam potential is preferably greater than the second beam potential.
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Golladay Steven D.
Hohn Fritz J.
Pfeiffer Hans C.
Burns W.
Eisenzopf Reinhard J.
International Business Machines - Corporation
Jones II Graham S.
Lashmit Douglas A.
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