Method of forming oxide superconducting films by in-situ anneali

Details Method of forming oxide superconducting films by in-situ anneali Method of forming oxide superconducting films by in-situ anneali

1990-01-24

1991-01-29

Morgenstern, Norman

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505742, 505731, 505732, 427 62, 4271263, 4272553, 20419224, B05D 512

Patent

active

049886703

ABSTRACT:
A process for preparing a superconducting thin film composed of compound oxide such as YBa.sub.2 Cu.sub.3 O.sub.7-.delta. deposited on a substrate such as SrTiO.sub.3. Improvement is in that a heat-treatment of the deposited thin film is carried out in a same chamber in which the thin film of compound oxide is deposited on the substrate without taking the substrate out of said chamber.

REFERENCES:
patent: 3932315 (1986-01-01), Sleight
Hor et al. "Superconductivity About 90 K in the Square-Planar Compound System ABa.sub.2 Cu.sub.3 .sub.O6+x with A=Y, La, Nd, Sm, Eu, Gd, Ho, Er and Lu" Phys. Rev. Lett. vol. 58(18) May 1987 pp. 1891-1894.
Tonouchi et al. "High Tc Superconductivity of rf-Sputtered Er -Ba-Cu-O Films" Jpn. J. Appl. Phys. vol. 26(9) Sep. 1987 L1462-1464.
Hammond et al "Superconducting Thin Films of the Perovskite Superconductors by Electron-Beam Deposition" Extended Abstracts. MRS. Apr., 1987 pp. 169-171.
Ohkuma et al. "Preparation of Y-Ba-Cu-O Thin Films by Rf-Magnetron Sputtering" Jpn. J. Appl. Phys. vol. 26(9) Sep. 1987 L1484-1486.
Koinuma et al. "Preparation of High-Tc Bi-Si-C a-O Superconducting Thin Films by AC Sputtering" Jpn. J. Appl. Phys. vol. 27(3) Mar. 1988 L376-377.
Morris et al. "The Deposition Fabrication and Characteristics of High Critical Temperature Devices" MRS vol. 99 Nov. 1987 pp. 197-202.
Kamada et al. "Structure and Superconducting Properties of Sputtered G d-Ba-Cu-O Thin Films" Appl. Phys. Lett. 52(20)May, 1988 pp. 1726-1728.
Gavaler et al. "Fabrication of High-Tc Superconducting YBa.sub.2 Cu.sub.3 O.sub.7 Films" Extended Abstract MRS Apr., 1988 pp. 193-196.
Kobin et al. "Superconducting Oxide Thin Films by Ion Beam Sputtering" Adv. Cer. Mat. vol. 2 No. 3B Jul. 1987 pp. 430-435.
Sheng et al. "New 120 K Tl-Ca-Ba-Cu-O Superconductor" Appl. Phys. Lett 52(20) May, 1988 pp. 1738-1740.
Maeda et al. "A New High-Tc Oxide Superconductor Without a Rare Earth Element" Jpn. J. Appl. Phys. 27(2)Feb. 1988 L 209-210.
M. Naito et al.--"Thin-Film Synthesis of the High-T.sub.c Oxide Superconductor YBA.sub.2 Cu.sub.3 O.sub.7 by Electron-Beam Codeposition"-Nov./Dec. 1987.
Magazine Article from Z. Phys. B, Dated Apr., 1986, Titled "Possible High T.sub.c Superconductivity in the Ba-La-Cu-O System" by J. G. Bednorz and K. A. Muller, pp. 189-193.

Affiliated with

Also associated with

Rating

Method of forming oxide superconducting films by in-situ anneali does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming oxide superconducting films by in-situ anneali, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming oxide superconducting films by in-situ anneali will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-813633