High-yield spatial light modulator with light blocking layer

Details High-yield spatial light modulator with light blocking layer High-yield spatial light modulator with light blocking layer

1992-08-11

1998-10-06

Prenty, Mark V.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257659, H01L 30232

Patent

active

058180958

ABSTRACT:
A semiconductor device with an optically active region which receives light, and has a layer of metal which blocks the light from the substrate. The substrate contains addressing circuitry which can experience current leakage if photocarriers are allowed to form by contact with light. A layer of metal is deposited as an integral part of the device to prevent the light from reaching the substrate.

REFERENCES:
patent: 4448491 (1984-05-01), Okubo
patent: 4710732 (1987-12-01), Hornbeck
patent: 5050123 (1991-09-01), Castro
patent: 5061049 (1991-10-01), Hornbeck
patent: 5345105 (1994-09-01), Sun et al.
Larry J. Hornbeck, "Deformable-Mirror Spatial Light Modulators," SPIE Critical Reviews Series, vol. 1150, Aug. 1989, pp. 86-102.

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